Quality of MEMS production ensuring by minimisation of its not quality [Текст] / Tkachenko N., Fedorchuk Ye., Yurchak I.
Фізична одиниця: Perspective technologies and methods in MEMS design. — 2013.Description: P. 38-39Language: англійська.Bibliography: Bibliogr.: 3 titles.. Item type:

Holdings: Складова частина документа P47
Bibliogr.: 3 titles.
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